Liquid phase direct laser printing of polymers for chemical sensing applications

被引：56

作者：

Boutopoulos, Christos ^{[1
]}

Tsouti, Vasiliki ^{[1
]}

Goustouridis, Dimitrios ^{[2
]}

Chatzandroulis, Stavros ^{[2
]}

Zergioti, Ioanna ^{[1
]}

机构：

[1] Natl Tech Univ Athens, Dept Phys, Athens 15780, Greece

[2] NCSR Demokritos, Inst Microelect, Aghia Paraskevi 15310, Greece

来源：

APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 19期

关键词：

chemical sensors; laser beam applications; liquid phase deposition; polymers;

D O I：

10.1063/1.3025596

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This letter demonstrates the direct laser printing of polymers on capacitive micromechanical arrays for the realization of a chemical sensor. Each sensor of a single chip array is composed of a thin Si membrane covered by a chemically sensitive polymer layer by means of a direct laser printing technique. We present the high spatial resolution deposition of three different sensitive polymer materials by the liquid phase laser induced forward transfer process. We also show that the optimum sensitivity of the sensors can be achieved by varying the percentage of the coverage of the sensors' membranes with the polymer.

引用

页数：3

共 21 条

[1] Laser direct-write techniques for printing of complex materials [J].

Arnold, Craig B. ;

Serra, Pere ;

Pique, Alberto .

MRS BULLETIN, 2007, 32 (01) :23-31

[2] Nanodroplets deposited in microarrays by femtosecond Ti:sapphire laser-induced forward transfer [J].

Banks, David P. ;

Grivas, Christos ;

Mills, John D. ;

Eason, Robert W. ;

Zergioti, Ioanna .

APPLIED PHYSICS LETTERS, 2006, 89 (19)

[3] Large area, high resolution, dry printing of conducting polymers for organic electronics [J].

Blanchet, GB ;

Loo, YL ;

Rogers, JA ;

Gao, F ;

Fincher, CR .

APPLIED PHYSICS LETTERS, 2003, 82 (03) :463-465

[4] Direct laser printing of biotin microarrays on low temperature oxide on Si substrates [J].

Boutopoulos, C. ;

Andreakou, P. ;

Kafetzopoulos, D. ;

Chatzandroulis, S. ;

Zergioti, I. .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2008, 205 (11) :2505-2508

[5] Fabrication of chemical sensors based on Si/polymer bimorphs [J].

Chatzandroulis, S ;

Tegou, E ;

Goustouridis, D ;

Polymenakos, S ;

Tsoukalas, D .

MICROELECTRONIC ENGINEERING, 2004, 73-4 :847-851

[6] Laser-induced forward transfer of liquids:: Study of the droplet ejection process [J].

Colina, M. ;

Duocastella, M. ;

Fernandez-Pradas, J. M. ;

Serra, P. ;

Morenza, J. L. .

JOURNAL OF APPLIED PHYSICS, 2006, 99 (08)

[7] Inkjet printing of polymers: State of the art and future developments [J].

de Gans, BJ ;

Duineveld, PC ;

Schubert, US .

ADVANCED MATERIALS, 2004, 16 (03) :203-213

[8] Patterning parameters for biomolecules microarrays constructed with nanosecond and femtosecond UV lasers [J].

Dinca, V. ;

Farsari, M. ;

Kafetzopoulos, D. ;

Popescu, A. ;

Dinescu, M. ;

Fotakis, C. .

THIN SOLID FILMS, 2008, 516 (18) :6504-6511

[9] Jet formation in the laser forward transfer of liquids [J].

Duocastella, M. ;

Fernandez-Pradas, J. M. ;

Serra, P. ;

Morenza, J. L. .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2008, 93 (02) :453-456

[10] Fabrication of organic light-emitting diode pixels by laser-assisted forward transfer [J].

Fardel, Romain ;

Nagel, Matthias ;

Nueesch, Frank ;

Lippert, Thomas ;

Wokaun, Alexander .

APPLIED PHYSICS LETTERS, 2007, 91 (06)

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