Microstructural control of RuO2 electrode and the related properties of (Ba,Sr)TiO3 thin films

被引：13

作者：

Choi, DK

Choi, JY

Won, JH

Paek, SH

机构：

来源：

FERROELECTRIC THIN FILMS V | 1996年 / 433卷

关键词：

D O I：

10.1557/PROC-433-45

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Effect of microstructure and surface roughness of oxide electrode on the properties of BST films has been investigated. (Ba,Sr)TiO3 and RuO2 films were deposited by RF magnetron sputtering technique. Surface morphology of RuO2 films were controlled by changing the O-2/Ar ratio during deposition It is found that the grain size and surface roughness of BST films are strongly influenced by RuO2 electrode underneath. When the grain size of RuO2 decreased by reducing either O-2/Ar ratio during sputtering or film thickness, BST film resulted in fine grain structure and the leakage current decreased due to the improvement in uniformity of the film. Dielectric constant of BST films, however, was decided from both degree of well defined grains and film continuity related to grain size and surface roughness.

引用

页码：45 / 50

页数：6