On the long pulse operation of an x-ray preionized, gas discharge pumped ArF excimer laser

Long laser pulses of up to 120 ns full width at half maximum have been achieved in a discharge pumped ArF laser, using x-ray preionization and prepulse-mainpulse excitation using a magnetic switch. For the realization of these long pulse lengths a fast current rise time in the first stage of the discharge is a crucial factor. The laser performance depends strongly on the discharge stability, and thus on the partial pressure of the fluorine in the laser gas mixture. (C) 1999 American Institute of Physics. [S0003-6951(99)01034-7].