Mechanical-thermal noise in micromachined gyros

被引：33

作者：

Annovazzi-Lodi, V ^{[1
]}

Merlo, S ^{[1
]}

机构：

[1] Univ Pavia, Dipartimento Elettron, I-27100 Pavia, Italy

来源：

MICROELECTRONICS JOURNAL | 1999年 / 30卷 / 12期

关键词：

mechanical-thermal fluctuations; vibrating-mass surface-machined gyroscope; Coriolis force;

D O I：

10.1016/S0026-2692(99)00046-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we investigate the effect of mechanical-thermal fluctuations on a vibrating-mass surface-micromachined gyroscope. It is found that this noise source represents a practical sensitivity limit in such devices and is likely to restrict their performances to the automotive grade. (C) 1999 Elsevier Science Ltd. All rights reserved.

引用

页码：1227 / 1230

页数：4

共 6 条

[1]

DONATI S, 1996, P INT C ADV MICR AUT

[2] MECHANICAL-THERMAL NOISE IN MICROMACHINED ACOUSTIC AND VIBRATION SENSORS [J].

GABRIELSON, TB .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (05) :903-909

[3]

KRANZ MS, 1997, P S GYR TECHN 1997 S

[4] Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs [J].

Park, KY ;

Lee, CW ;

Oh, YS ;

Cho, YH .

SENSORS AND ACTUATORS A-PHYSICAL, 1998, 64 (01) :69-76

[5]

SORG H, 1997, P S GYR TECHN 1997 S

[6]

VOSS R, SPIE, V3224, P62

← 1 →