A new instrument for measuring both the magnitude and angle of low level linear birefringence

被引:134
作者
Wang, BL [1 ]
Oakberg, TC [1 ]
机构
[1] Hinds Instruments Inc, Hillsboro, OR 97124 USA
关键词
D O I
10.1063/1.1150000
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This article describes a sensitive method for measuring both the magnitude and the angle of the fast axis of low level linear birefringence in optical materials. Several different approaches have been investigated and one of them has been chosen as the basis for a linear birefringence measurement instrument. The instrument employs a low birefringence photoelastic modulator for modulating the polarization states of a He-Ne laser beam. After the modulated laser beam passes through the sample, two detecting channels analyze the polarization change caused by the sample. An algorithm has been developed to calculate the magnitude and angle of the retardance in a sample. A computer program implements the algorithm and displays the calculated values. Using this instrument, selected samples with different levels of linear birefringence have been studied. The resulting instrument achieves high precision and sensitivity for the final measurements. The sensitivity of the magnitude of linear birefringence is better than 0.005 nm (similar to 0.003 degrees with a He-Ne laser at 632.8 nm), and the sensitivity of the fast axis angle of the sample is < 1 degrees (for retardance greater than or equal to 0.5 nm). (C) 1999 American Institute of Physics. [S0034- 6748(99)01710-4].
引用
收藏
页码:3847 / 3854
页数:8
相关论文
共 20 条
[1]   SENSITIVE DEVICES TO DETERMINE STATE AND DEGREE OF POLARIZATION OF A LIGHT-BEAM USING A BIREFRINGENCE MODULATOR [J].
BADOZ, J ;
BILLARDON, M ;
CANIT, JC ;
RUSSEL, MF .
JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE, 1977, 8 (06) :373-384
[2]  
BILLARDON M, 1966, CR ACAD SCI B PHYS, V262, P1672
[3]  
COLLIER D, 1999, SEMICONDUCTOR O 0505
[4]  
DEJULE R, 1999, SEMICONDUCTOR INT, V22, P36
[5]   POLARIZATION MODULATION - THE MEASUREMENT OF LINEAR AND CIRCULAR-DICHROISM [J].
DRAKE, AF .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1986, 19 (03) :170-181
[6]  
FRATTINI PL, 1986, THESIS STANFORD U
[7]   AN IMPROVED METHOD FOR HIGH REFLECTIVITY ELLIPSOMETRY BASED ON A NEW POLARIZATION MODULATION TECHNIQUE [J].
JASPERSON, SN ;
SCHNATTERLY, SE .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1969, 40 (06) :761-+
[8]   Two-modulator generalized ellipsometry: experiment and calibration [J].
Jellison, GE ;
Modine, FA .
APPLIED OPTICS, 1997, 36 (31) :8184-8189
[9]   2-CHANNEL POLARIZATION MODULATION ELLIPSOMETER [J].
JELLISON, GE ;
MODINE, FA .
APPLIED OPTICS, 1990, 29 (07) :959-974
[10]  
JOHNSON SJ, THESIS STANFORD U