MEMS based sensor system for environmental monitoring

被引：2

作者：

Daly, JT ^{[1
]}

Johnson, EA ^{[1
]}

Moelders, N ^{[1
]}

McNeal, M ^{[1
]}

Pralle, M ^{[1
]}

Greenwald, AC ^{[1
]}

Ho, B ^{[1
]}

Puscasu, I ^{[1
]}

George, T ^{[1
]}

Choi, DS ^{[1
]}

机构：

[1] Ion Opt Inc, Waltham, MA 02454 USA

来源：

ADVANCED ENVIRONMENTAL SENSING TECHNOLOGY II | 2002年 / 4576卷

关键词：

MEMS; non-dispersive infrared spectroscopy; NDIR; photonic band gap; gas sensors; microsensor array;

D O I：

10.1117/12.456941

中图分类号：

X [环境科学、安全科学];

学科分类号：

08 ; 0830 ;

摘要：

A new IR-based sensor technology is introduced for environmental monitoring of industrial pollutants (CO2, CO, NOx, etc.). The design concept exploits Si-based, thermally isolated suspended bridge structures. These devices, which function as both IR emitter and detector, are fabricated using MEMS-based processing methods. Photonic bandgap (PBG) modified surfaces enable narrow band IR emission for high chemical selectivity and sensitivity. Spectral tuning is accomplished by controlling symmetry and lattice spacing of the PBG structures. IR spectroscopic studies were used to characterize transmission, absorption and emission spectra in the 2 to 20 mum wavelength range. Device characterization studies measured drive and emission power, temperature uniformity, and black body detectivity. Gas detection was achieved using non-dispersive infrared (NDIR) spectroscopic techniques, whereby target gas species and concentrations were determined from comparison to referenced spectra. A sensor system employing the emitter/detector sensor-chip with gas cell and reflective optics is demonstrated and CO2 gas sensitivity limits are reported. A multi-channel microsensor-array is proposed for multigas (e.g., CO2, CO, and NOx, etc.) detection.

引用

页码：49 / 55

页数：7

共 4 条

[1] Extraordinary optical transmission through sub-wavelength hole arrays [J].

Ebbesen, TW ;

Lezec, HJ ;

Ghaemi, HF ;

Thio, T ;

Wolff, PA .

NATURE, 1998, 391 (6668) :667-669

[2]

GREENWALD AC, 2000, MRS S P, V637

[3]

MOELDERS N, 2001, IN PRESS SPIRE, V40

[4]

PRALLE MU, 2001, IN PRESS SPIE S ENV, V50

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