A layered surface acoustic wave ZnO/LiTaO3 structure with a WO3 selective layer for hydrogen sensing

被引：32

作者：

Ippolito, SJ ^{[1
]}

Kandasamy, S ^{[1
]}

Kalantar-Zadeh, K ^{[1
]}

Trinchi, A ^{[1
]}

Wlodarski, W ^{[1
]}

机构：

[1] Univ Melbourne, RMIT, Sch Elect & Comp Engn, Melbourne, Vic, Australia

来源：

SENSOR LETTERS | 2003年 / 1卷 / 01期

关键词：

layered SAW; surface acoustic wave; hydrogen sensor; Tungsten trioxide; zinc oxide;

D O I：

10.1166/sl.2003.007

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A layered surface acoustic wave (SAW) gas sensor is investigated for hydrogen concentrations of 0.5% and 1% in air at different operational temperatures. The device structure is based on a layered SAW device fabricated on a 36 degrees X-cut, Y-propagating LiTaO3 substrate. A ZnO guiding layer is employed to increase sensor sensitivity, and a thin film of WO3 provides the selectivity toward hydrogen gas. Such a structure has the advantage of confining the acoustic wave energy at the surface of the device, which increases the sensitivity of the device. In this paper, the fabrication of the ZnO/36 degrees YX LiTaO3 sensor is described, and the sensor's response features are analyzed in terms of response time, recovery time, and response magnitude as a function of operational temperature. Furthermore, the hydrogen interaction with the WO3 selective layer is briefly described.

引用

页码：33 / 36

页数：4

共 14 条

[1] Hydrogen leak detection using an optical fibre sensor for aerospace applications [J].

Bévenot, X ;

Trouillet, A ;

Veillas, C ;

Gagnaire, H ;

Clément, M .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 67 (1-2) :57-67

[2] The accelerating role of water in hydrogen insertion into tungsten trioxide [J].

Bludská, J ;

Vondrák, J ;

Jakubec, I ;

Krtil, P .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1999, 56 (3-4) :231-235

[3] Investigation on the O3 sensitivity properties of WO3 thin films prepared by sol-gel, thermal evaporation and r.f. sputtering techniques [J].

Cantalini, C ;

Wlodarski, W ;

Li, Y ;

Passacantando, M ;

Santucci, S ;

Comini, E ;

Faglia, G ;

Sberveglieri, G .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 64 (1-3) :182-188

[4]

CARON JJ, 1997, FREQ CONTR S, P156

[5] SURFACE ACOUSTIC-WAVE HYDROGEN SENSOR [J].

DAMICO, A ;

PALMA, A ;

VERONA, E .

SENSORS AND ACTUATORS, 1982, 3 (01) :31-39

[6]

DAMICO A, 1982, IEEE ULTR S, P308

[7] The role of water in gasochromic WO3 films [J].

Georg, A ;

Graf, W ;

Neumann, R ;

Wittwer, V .

THIN SOLID FILMS, 2001, 384 (02) :269-275

[8] Bilayer structure for hydrogen detection in a surface acoustic wave sensor system [J].

Jakubik, WP ;

Urbanczyk, MW ;

Kochowski, S ;

Bodzenta, J .

SENSORS AND ACTUATORS B-CHEMICAL, 2002, 82 (2-3) :265-271

[9] Novel electrochromic devices (ECD) of tungsten oxide (WO3) thin film integrated with amorphous silicon germanium photodetector for hydrogen sensor [J].

Lee, KH ;

Fang, YK ;

Lee, WJ ;

Ho, JJ ;

Chen, KH ;

Liao, KC .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 69 (1-2) :96-99

[10] Stoichiometry and microstructure effects on tungsten oxide chemiresistive films [J].

Moulzolf, SC ;

Ding, SA ;

Lad, RJ .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 77 (1-2) :375-382

← 1 2 →