A passive wireless integrated humidity sensor

被引：77

作者：

Harpster, TJ ^{[1
]}

Stark, B ^{[1
]}

Najafi, K ^{[1
]}

机构：

[1] Univ Michigan, Ctr Wireless Integrated Microsyst, Ann Arbor, MI 48109 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 95卷 / 2-3期

基金：

美国国家卫生研究院;

关键词：

IHS; polyimide; relative humidity;

D O I：

10.1016/S0924-4247(01)00720-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a single-chip integrated humidity sensor (IHS) capable of wireless operation through inductive coupling with a remote antenna. The 1.5 mm x 0.5 mm x 8 mm sensor chip consists of a planar electroplated copper coil (20 mum thick, 30 mum pitch, and 23 turns) and a silicon substrate separated by a 4100-5600 Angstrom polyimide film. The resonant frequency of the IHS change, with humidity and the measured sensitivity ranges from 4 to 16 kHz/% RH. Measurements show a hysteresis of 4.5% RH over a range of 30-70% FH for a 5600 A thick polyimide film MS. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：100 / 107

页数：8

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