A three-dimensional Shape Memory Alloy loop actuator

被引：25

作者：

Nakamura, Y

Nakamura, S

Buchaillot, L

Fujita, H

机构：

来源：

MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS | 1997年

关键词：

D O I：

10.1109/MEMSYS.1997.581821

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Shape Memory Alloy (SMA) actuators can produce large displacement/force and are robust against external overload. Their structure is simple because an SMA element serves as both structural and functional parts. This paper deals with deposition of thin films, heat treatment and patterning of Titanium-Nickel (TiNi) SMA. Microactuators have been fabricated by this process. Typical dimensions of the actuator were 10 mu m in thickness, 30 mu m in width and 800 mu m in length. They produced large displacement up to 300 mu m, and large force of more than 5 mN was generated thanks to the intrinsic recovery stress of the SMA. A three-dimensional SMA loop actuator unit composed of two SMA cantilevers is widely described. The dimensions of the loop actuator were 1000 mu m in length and 600 mu m in height. The loop actuator has been successfully operated. It features repeatable motion up to 20 Hz. The three-dimensional loop actuator is found to be very attractive to perform external work for MicroElecuoMechanical Systems (MEMS).

引用

页码：262 / 266

页数：5