Micromachined porous polymer for bubble free electro-osmotic pump

被引：15

作者：

Mutlu, S ^{[1
]}

Yu, C ^{[1
]}

Selvaganapathy, P ^{[1
]}

Svec, F ^{[1
]}

Mastrangelo, CH ^{[1
]}

Frechet, JMJ ^{[1
]}

机构：

[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984050

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel porous polymer was microfabricated to serve as a porous plug for a new device, the porous plug electro-osmotic pump (pp-EOP). The plug eliminates any back pressure effects while enhances electro-osmotic flow in a channel. The pp-EOP was batch fabricated by surface micromachining on top of a silicon wafer. The pp-EOP device is driven by a periodic, zero-average injected current signal at low frequencies producing bubble-free electro-osmotic flow with reversible net movement. Testing of the device produced an average water-air interface velocity of 1.8 mum/s at 0.8 Hz. The velocity was increased to 4.8 and to 13.9 mum/s by necking the channel size.

引用

页码：19 / 23

页数：5

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