Filtration of Sub-100 nm Particles Using a Bulk-Micromachined, Direct-Bonded Silicon Filter

被引：17

作者：

Tu, Jay K. ^{[1
]}

Huen, Tony ^{[1
]}

Szema, Robert ^{[1
]}

Ferrari, Mauro ^{[1
]}

机构：

[1] Univ Calif Berkeley, Biomed Microdevices Ctr, Berkeley, CA 94720 USA

来源：

BIOMEDICAL MICRODEVICES | 1999年 / 1卷 / 02期

关键词：

bioseparation; filter; MEMS; micromachining; BioMEMS;

D O I：

10.1023/A:1009944423778

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

For successful size separation in biomedical applications, the filter used must meet several strict criteria. Not only must it have precisely-machined sub-100nm pores (<5% variation), but it must also be able to handle large and small volumes with very high reduction ratios (>10(4)). In this paper, we will present a bulk-micromachined, direct-bonded silicon nanofilter that can remove particles as small as 44 nm. In doing so, we will describe the fabrication, the gas and liquid characterization, and the filtrations studies done on 44nm and 100nm beads.

引用

页码：113 / 119

页数：7

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