Optical beam steering using surface micromachined gratings and optical phased arrays

被引:12
作者
Burns, DM
Bright, VM
Gustafson, SC
Watson, EA
机构
来源
OPTICAL SCANNING SYSTEMS: DESIGN AND APPLICATIONS | 1997年 / 3131卷
关键词
microelectromechanical systems; optics; mirrors; gratings; arrays;
D O I
10.1117/12.277738
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Two categories of optical beam steering micro-electro-mechanical systems (MEMS) were investigated: variable blaze gratings (VBGs) and linear optical phased arrays. All devices were surface micromachined using the Multi-User MEMS Processes (MUMPs). VBGs use an adjustable blaze angle to direct the majority of reflected light into a selectable diffraction order. Diffraction efficiencies greater than 50% were demonstrated. Linear optical phased arrays use a single row of piston micromirrors to create a far-field pattern with a steerable main lobe along one axis. All devices were constructed of polysilicon and gold and were actuated with electrostatic force. Electrostatic actuation provides high speed operation at a very low drive power. These optical beam steering devices discussed in this work are less optically efficient than a single pivoting mirror, but they require no post-fabrication assembly and can handle large beam diameters. Also, the low individual mass of the elements in surface micromachined VBGs and optical phased arrays yields faster system response times than a single macroscaIe pivoting mirror.
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页码:99 / 110
页数:12
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