An investigation of the wear track on DLC (a-C:H) film by time-of-flight secondary ion mass spectroscopy

被引:33
作者
Fukui, H [1 ]
Irie, M [1 ]
Utsumi, Y [1 ]
Oda, K [1 ]
Ohara, H [1 ]
机构
[1] Sumitomo Elect Ind Ltd, Itami Res Labs, Itami, Hyogo 6640016, Japan
关键词
DLC film; PACVD; time-of-flight; secondary ion mass spectroscopy;
D O I
10.1016/S0257-8972(01)01422-0
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Tribological behaviors of diamond-like carbon (DLC) on steel under ambient air without lubricant were investigated. DLC (a-C:H) film was prepared on a cemented carbide substrate by radio frequency (r.f.) plasma assisted chemical vapor deposition (PACVD) using a methane (CH4) precursor. The hydrogen content in DLC film was approximately 35 at.%. Pin-on-disk experiments were conducted on DLC-coated disk at the sliding velocity of 52 mm/s under 10 N loading using a steel ball (AISI 52100, 6 min in diameter) as the pin material. After the evaluation of friction coefficient and wear resistance, the transferred layer and wear debris on the wear track of DLC film were investigated using Time-of-Flight Secondary Ion Mass Spectroscopy (TOF-SIMS). The data of TOF-SIMS show the existence of hydrocarbon macromolecules (CnHm) inside the wear track. This result suggests there is a formation of some kind of lubricant materials containing polymer (macromolecule of hydrocarbon), which is generated by the polymerization of DLC film during the tribo-test, contributing thus, to the low friction performance of DLC film. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:378 / 383
页数:6
相关论文
共 18 条
[1]   Diamond-like carbon-based functionally gradient coatings for space tribology [J].
Donnet, C ;
Fontaine, J ;
Le Mogne, T ;
Belin, M ;
Héau, C ;
Terrat, JP ;
Vaux, F ;
Pont, G .
SURFACE & COATINGS TECHNOLOGY, 1999, 120 :548-554
[2]   TRIBOCHEMISTRY OF DIAMOND-LIKE CARBON COATINGS IN VARIOUS ENVIRONMENTS [J].
DONNET, C ;
BELIN, M ;
AUGE, JC ;
MARTIN, JM ;
GRILL, A ;
PATEL, V .
SURFACE & COATINGS TECHNOLOGY, 1994, 68 :626-631
[3]   Recent progress on the tribology of doped diamond-like and carbon alloy coatings: a review [J].
Donnet, C .
SURFACE & COATINGS TECHNOLOGY, 1998, 100 (1-3) :180-186
[4]   Friction control of diamond-like carbon coatings [J].
Donnet, C ;
Grill, A .
SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3) :456-462
[5]   Wear-resistant fluorinated diamondlike carbon films [J].
Donnet, C ;
Fontaine, J ;
Grill, A ;
Patel, V ;
Jahnes, C ;
Belin, M .
SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3) :531-536
[6]   Synthesis of superlow-friction carbon films from highly hydrogenated methane plasmas [J].
Erdemir, A ;
Eryilmaz, OL ;
Nilufer, IB ;
Fenske, GR .
SURFACE & COATINGS TECHNOLOGY, 2000, 133 :448-454
[7]   Effect of source gas and deposition method on friction and wear performance of diamondlike carbon films [J].
Erdemir, A ;
Fenske, GR ;
Terry, J ;
Wilbur, P .
SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3) :525-530
[8]   Effect of polymeric debris on the tribological behavior of diamond-like carbon films [J].
Eun, KY ;
Lee, KR ;
Yoon, ES ;
Kong, HS .
SURFACE & COATINGS TECHNOLOGY, 1996, 86-7 (1-3) :569-574
[9]  
Glocker D.A., 1995, Handbook of Thin Film Process Technology
[10]   Tribology of diamondlike carbon and related materials: an updated review [J].
Grill, A .
SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3) :507-513