Preparation of Bragg gratings in sputter-deposited GeO2-SiO2 glasses by excimer-laser irradiation

被引:35
作者
Nishii, J [1 ]
Yamanaka, H [1 ]
Hosono, H [1 ]
Kawazoe, H [1 ]
机构
[1] TOKYO INST TECHNOL,MAT & STRUCT LAB,MIDORI KU,YOKOHAMA,KANAGAWA 227,JAPAN
关键词
D O I
10.1364/OL.21.001360
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
GeO2-SiO2 thin glass films were prepared by the rf sputtering deposition method. Changes in the refractive index of -3% and in the volume of +18% were induced in the film by irradiation with excimer-laser pulses. Bragg gratings a (periodic surface-relief pattern with a sinusoidal wave) have been written in the film by irradiation through a phase mask.
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页码:1360 / 1362
页数:3
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