A framework for robust run by run control with lot delayed measurements

被引：8

作者：

Baras, JS ^{[1
]}

Patel, NS ^{[1
]}

机构：

[1] UNIV MARYLAND,SYST RES INST,COLLEGE PK,MD 20742

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 1997年 / 10卷 / 01期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/66.554488

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

This paper considers the run by run control problem. We develop a framework to solve such a problem in a robust fashion. The framework also encompasses the case when the system is subject to delayed measurements. Recent results available for the control of such systems are reviewed, and two examples are presented. The first example is based on the end-pointing problem for a deposition process, and is subject to noise which has both Gaussian and uniform components, The second one is concerned with rate control in an LPCVD reactor.

引用

页码：75 / 83

页数：9

共 21 条

[1]

Baras JS, 1995, PROCEEDINGS OF THE 34TH IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-4, P2302, DOI 10.1109/CDC.1995.480546

[2]

BARAS JS, 1995, PROCEEDINGS OF THE 1995 AMERICAN CONTROL CONFERENCE, VOLS 1-6, P1990

[3]

BARAS JS, TR9563 ISR

[4]

BARAS JS, IN PRESS IEEE T AUTO

[5]

BARAS JS, 1996, P 13 IFAC WORLD C, VE, P383

[6]

BARAS JS, 1995, P IEEE CPMT INT EL M, P210

[7]

BARAS JS, TR9475 ISR

[8]

BARAS JS, 1997, IN PRESS P EUR CONTR

[9]

BASAR T, 1991, H OPTIMAL CONTROL RE

[10]

Bertsekas D. P., 1987, DYNAMIC PROGRAMMING

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