Fabrication of mesoscopic superconducting Nb wires using conventional electron-beam lithographic techniques

被引：25

作者：

Kim, N ^{[1
]}

Hansen, K ^{[1
]}

Toppari, J ^{[1
]}

Suppula, T ^{[1
]}

Pekola, J ^{[1
]}

机构：

[1] Univ Jyvaskyla, Dept Phys, FIN-40531 Jyvaskyla, Finland

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2002年 / 20卷 / 01期

关键词：

D O I：

10.1116/1.1445168

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Conventional electron-beam lithography has been used to fabricate mesoscopic Nb wires. Nb was deposited in an ultrahigh vacuum evaporation chamber using electron gun heating. The typical linewidth and the thickness were 200 and 50 nm, respectively. The transition temperatures were above 7 K. They increased with thickness and linewidth. To demonstrate the feasibility of two angle evaporation techniques, we also fabricated Nb/(Al-)AlOx/Nb tunnel junctions showing superconducting single-electron transistor characteristics. (C) 2002 American Vacuum Society.

引用

页码：386 / 388

页数：3

共 16 条

[1] Quantum suppression of superconductivity in ultrathin nanowires [J].

Bezryadin, A ;

Lau, CN ;

Tinkham, M .

NATURE, 2000, 404 (6781) :971-974

[2]

BLUTHNER K, 1996, J PHYS IV, V6, pC3

[3] INELASTIC ELECTRON LIFETIME IN NIOBIUM FILMS [J].

DALRYMPLE, BJ ;

WOLF, SA ;

EHRLICH, AC ;

GILLESPIE, DJ .

PHYSICAL REVIEW B, 1986, 33 (11) :7514-7519

[4] VERY SMALL (GREATER-THAN 20 NM) LITHOGRAPHIC WIRES, DOTS, RINGS, AND TUNNEL-JUNCTIONS [J].

DOLAN, GJ ;

DUNSMUIR, JH .

PHYSICA B, 1988, 152 (1-2) :7-13

[5] Thermostable trilayer resist for niobium lift-off [J].

Dubos, P ;

Charlat, P ;

Crozes, T ;

Paniez, P ;

Pannetier, B .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (01) :122-126

[6]

Grabert H., 1992, Single Charge Tunneling

[7] LOCALIZATION AND INTERACTION EFFECTS IN ULTRATHIN AMORPHOUS SUPERCONDUCTING FILMS [J].

GRAYBEAL, JM ;

BEASLEY, MR .

PHYSICAL REVIEW B, 1984, 29 (07) :4167-4169

[8] FABRICATION AND MEASUREMENT OF A NB BASED SUPERCONDUCTING SINGLE-ELECTRON TRANSISTOR [J].

HARADA, Y ;

HAVILAND, DB ;

DELSING, P ;

CHEN, CD ;

CLAESON, T .

APPLIED PHYSICS LETTERS, 1994, 65 (05) :636-638

[9]

HEKKING FWJ, 1994, PHYSICA B, V203

[10] WEAK LOCALIZATION, FLUCTUATION, AND SUPERCONDUCTIVITY IN THIN NB FILMS AND WIRES [J].

HIKITA, M ;

TAJIMA, Y ;

TAMAMURA, T ;

KURIHARA, S .

PHYSICAL REVIEW B, 1990, 42 (01) :118-126

← 1 2 →