The electrical field effect on the growth of titanium oxide layers by ML-ALE

被引:4
作者
Drozd, VE
Kopilov, NN
Aleskovski, VB
机构
[1] Department of Chemistry, St. Petersburg State University
基金
俄罗斯基础研究基金会;
关键词
D O I
10.1016/S0169-4332(96)00976-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Study of the electric field effect on the titanium oxide growth by molecular layering (ML)-atomic layer epitaxy (ALE) method was produced in the present work. It was found that electric field effect on the adsorption process of the precursors during ML-ALE cycles under both polarities of a field. The field affect depended on a stage of a cycle ML-ALE (half-reaction of ML-ALE). The strength of a field strongly influenced on the thickness of titanium oxide layers in the beginning of a growth process until the layer thickness reached 5.0-6.0 nm. It was found that field influence did not depend on a sublayer composition. The electric field affect at different temperatures and voltages was studied. It was found that electric field effected a structure of the synthesized layers. At room temperature we synthesized a rutile structure - the more thermodynamically stable modification of titanium oxide. The explanation of these results was made on the basis of an electronic adsorption theory.
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页码:258 / 263
页数:6
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