X-ray diffraction on a multilayer mirror modulated by surface acoustic waves

被引:15
作者
Roshchupkin, DV
Schelokov, IA
Tucoulou, R
Brunel, M
机构
[1] RUSSIAN ACAD SCI,INST MICROELECT TECHNOL & HIGH PUR MAT,CHERNOGOLOVKA 142432,MOSCOW DISTRICT,RUSSIA
[2] CNRS,LAB CRISTALLOG 166X,F-38042 GRENOBLE,FRANCE
关键词
X-ray; surface acoustic waves; X-ray mirror;
D O I
10.1016/S0168-583X(97)00293-0
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This paper reports the investigation of the X-ray Bragg diffraction on a multilayer mirror modulated by a short wavelength (12 mu m) surface acoustic wave. Useful parameters to determine the diffraction pattern are the amplitude, the period of the surface acoustic wave, and the deviation of the incident angle from the exact Bragg position. It is shown that changing the incident angle induces some variations in the distribution of the diffracted intensity between the diffraction orders. A model based on the dynamic diffraction theory has been developed and is compared to the experimental results.
引用
收藏
页码:414 / 418
页数:5
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