Hot-tube probes of thermal anemometers with high spatial and temporal resolution

被引:4
作者
Fomin, V. M.
Shiplyuk, A. N.
Aniskin, V. M.
Maslov, A. A.
Pai, V. V.
Prinz, V. Ya.
Seleznev, V. A.
机构
[1] Russian Acad Sci, Inst Theoret & Appl Mech, Siberian Div, Novosibirsk 630128, Russia
[2] Russian Acad Sci, Inst Semicond Phys, Siberian Div, Novosibirsk 630090, Russia
基金
俄罗斯基础研究基金会;
关键词
D O I
10.1134/S1028335806030098
中图分类号
O3 [力学];
学科分类号
08 ; 0801 ;
摘要
Models of InGaAs/GaAs/Me probes of a thermal anemometers with high spatial and temporal resolution, are fabricated. The current-voltage characteristics and the temperature dependence of the tube resistance were determined to use the fabricated tubes as sensitive elements of the thermal anemometer probe. The time constant of the hot-tube probe turned out to be 80 times smaller than that for the standard hot-wire probe. The technology of fabricating hot-tube probe is based on semiconductor technologies, and such arrays can ensure a high resolution in measuring rapid process in gas and fluid flows.
引用
收藏
页码:132 / 135
页数:4
相关论文
共 10 条
[1]  
[Базовкин В.М. Bazovkin . M.], 2005, [Прикладная физика, Prikladnaya fizika], P97
[2]   Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils [J].
Golod, SV ;
Prinz, VY ;
Mashanov, VI ;
Gutakovsky, AK .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2001, 16 (03) :181-185
[3]  
GOPEL W, 1994, CARCINOG COMPR SURV, V7, P574
[4]  
GOPEL W, 1995, CARCINOG COMPR SURV, V8, P565
[5]   The development and application of microthermal sensors with a mesh-membrane supporting structure [J].
Hung, ST ;
Wong, SC ;
Fang, WL .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 84 (1-2) :70-75
[6]   Anemometer with hot platinum thin film [J].
Mailly, F ;
Giani, A ;
Bonnot, R ;
Temple-Boyer, P ;
Pascal-Delannoy, F ;
Foucaran, A ;
Boyer, A .
SENSORS AND ACTUATORS A-PHYSICAL, 2001, 94 (1-2) :32-38
[7]   Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays [J].
Prinz, VY ;
Seleznev, VA ;
Gutakovsky, AK ;
Chehovskiy, AV ;
Preobrazhenskii, VV ;
Putyato, MA ;
Gavrilova, TA .
PHYSICA E, 2000, 6 (1-4) :828-831
[8]   A new technique for fabricating three-dimensional micro- and nanostructures of various shapes [J].
Prinz, VY ;
Grützmacher, D ;
Beyer, A ;
David, C ;
Ketterer, B ;
Deckardt, E .
NANOTECHNOLOGY, 2001, 12 (04) :399-402
[9]  
SHIPLYUK AN, Patent No. 2207576
[10]   Directional rolling of strained heterofilms [J].
Vorob'ev, AB ;
Prinz, VY .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2002, 17 (06) :614-616