Design of microfabricated inductors

被引：59

作者：

Daniel, L ^{[1
]}

Sullivan, CR ^{[1
]}

Sanders, SR ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

来源：

IEEE TRANSACTIONS ON POWER ELECTRONICS | 1999年 / 14卷 / 04期

关键词：

anisotropy; application; automatic design; buck converter; code; coil fabrication process; computer program; control of permeability; design; design example; design methodology; distributed gap; eddy currents; efficiency; end turns; fabrication process; hard-baked photoresist; high-frequency power inductors; hysteresis losses; inductance adjustment; inductor geometries; inductors; loss analysis; magnetic thin films; microfabricated inductors; microfabricated inductors design; multilayer core; multiturn windings; numerical simulation; optimization; permalloy; planar inductors; power density; quasi-distributed gap; resonant converter; secondary effects; SEM pictures;

D O I：

10.1109/63.774209

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Possible configurations for microfabricated inductors are considered, Inductance can be set by adjusting permeability through control of anisotropy of a permalloy core or via a patterned quasi-distributed gap. A design methodology based on a simple model is proposed. A more accurate model and a numerical optimization are also developed. Design examples for 5- and 10-MHz buck converters and 2.5-MHz resonant converter applications are presented.

引用

页码：709 / 723

页数：15

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