Disturbance observer and feedforward design for a high-speed direct-drive positioning table

被引:449
作者
Kempf, CJ [1 ]
Kobayashi, S
机构
[1] Kensington Labs Inc, Richmond, CA 94804 USA
[2] NSK Ltd, Precis Machinery & Parts Technol Ctr, Maebashi, Gumma, Japan
基金
美国国家科学基金会;
关键词
control systems; digital control; feedforward systems; linear motors; motion control; semiconductor device packaging; tracking;
D O I
10.1109/87.784416
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Design and implementation of a discrete-time tracking controller for a precision positioning table actuated by direct-drive motors is considered. The table has acceleration capabilities in excess of 5 G, positioning accuracy at the micron level, and is used in applications such as semiconductor packaging, Unlike a ballscrew driven system, the controller in a direct-drive system must provide a high level of disturbance rejection while avoiding problems due to the relatively slow electrical dynamics of the motor and power amplifier. The stiff mechanical elements in a direct-drive system allow generous use of feedforward, but complete inversion of the closed-loop dynamics at high frequencies does not necessarily give the best performance. The controller proposed here uses a disturbance observer and proportional derivative (PD) compensation in the feedback path and a zero phase error tracking controller and zero phase low-pass filter in the feedforward path. The focus of this work is in two areas. First, existing disturbance observer design techniques are extended to account for time delay in the plant. Second, practical difficulties with excessive feedforward gains are examined and a low-order filter design method is proposed. Experimental results for quantized low-order position reference trajectories, which are commonly used in industrial systems, demonstrate the effectiveness of the approach.
引用
收藏
页码:513 / 526
页数:14
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