A design and fabrication of a 3D force sensitive microprobe for surface characterization.

被引：4

作者：

Grabiec, PB

Sunyk, R

Shi, F

Popovic, G

Gotszalk, T

Hudek, P

Dumania, P

Rangelow, IW

机构：

[1] Institute of Electron Technology, 02-638 Warszawa

[2] Institute of Technical Physics, University of Kassel, 34109 Kassel

[3] Institute of Microsystem Technology, Wroclaw Univ. of Technology, 50-372 Wroclaw

[4] Institute of Computer Systems, Slovak Academy of Sciences, SK-842 37 Bratislava

来源：

MICROELECTRONIC ENGINEERING | 1999年 / 46卷 / 1-4期

关键词：

D O I：

10.1016/S0167-9317(99)00120-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A microprobe device for Scanning Force Microscopy, based on a new design, capable of differentiation of forces acting in x-, y-, and z-directions is presented in this paper. The novelty of this device involves both, a new shape of the silicon structure and a specific location of the piezoresistors, enabling better separation of the forces and measurement of forces acting in three dimensions. A FEM simulation of the device, its design, fabrication procedure and achieved results are presented.

引用

页码：405 / 408

页数：4

共 6 条

[1] ATOMIC FORCE MICROSCOPE
BINNIG, G
QUATE, CF
GERBER, C
[J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933
[2] BINNIG G, 1982, HELV PHYS ACTA, V55, P726
[3] GRABIEC PB, 1996, MICROELECTRONIC ENG, V35, P329
[4] Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers
Linnemann, R
Gotszalk, T
Rangelow, IW
Dumania, P
Oesterschulze, E
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (02): : 856 - 860
[5] ATOMIC-SCALE FRICTION OF A TUNGSTEN TIP ON A GRAPHITE SURFACE
MATE, CM
MCCLELLAND, GM
ERLANDSSON, R
CHIANG, S
[J]. PHYSICAL REVIEW LETTERS, 1987, 59 (17) : 1942 - 1945
[6] Tortonese M., 1991, IEEE PUBLICATION, P448

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