A new fabrication method for submicron trackwidth thin film heads

被引:8
作者
Pan, G [1 ]
Takahashi, S
Walker, JF
Mapps, DJ
Yamakawa, K
Honda, N
Ouchi, K
机构
[1] Univ Plymouth, Sch Elect Commun & Elect Engn, CRIST, Plymouth PL4 8AA, Devon, England
[2] Akita Res Inst Adv Technol, AIT, Akita 01016, Japan
[3] FEI Europe Ltd, Cambridge CB4 4PS, England
基金
英国工程与自然科学研究理事会;
关键词
thin-film heads; submicron trackwidth; focused ion beam milling; scanning Kerr effect microscope; dual-axis anisotropy;
D O I
10.1016/S0304-8853(99)00421-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A new head structure suitable for submicron trackwidth writer and its fabrication method were described. The key features of the new head were to use the film thickness instead of the stripe width of the head core to define the recording trackwidth and a laminated dual-axis anisotropy back-core to improve the flux carrying efficiency in the head. The front gap of the head was fabricated by focused ion beam precision machining/deposition. A wall angle of 1 degrees was achievable for a gap milled in a 1 mu m-thick track-core. The dual-axis film, which consists of two uniaxial sandwiches with their easy axes orthogonally oriented, exhibited isotropic BH loops and isotropic high-frequency permeability after RFA. significant improvement of magnetisation response and Aux conduction of the dual-axis core after RFA were observed by SKEM examinations with the cores excited by an electromagnet at frequency of 0.5 MHz and by a single-turn coil at 10 MHz. Although the dual-axis film exhibited isotropic magnetic properties after RFA, SKEM observations indicate that the two uniaxial sandwiches in the dual-axis core behaved independently. The isotropic magnetic properties of the dual-axis films after RFA appear to be the average effect of the two uniaxial sandwiches. The high frequency flux conduction was more effective along the hard axis than along the easy axis. The effective flux conduction in the dual-axis core was attributed to the contribution of hard axis behaviour of each uniaxial sandwich. However, domain wall motion-type response was also observed in the dual-axis core. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:583 / 592
页数:10
相关论文
共 12 条
[1]   DYNAMIC MAGNETIZATION CHANGES IN LAMINATED PERMALLOY-FILMS [J].
ISHI, T ;
MOTOMURA, Y .
IEEE TRANSACTIONS ON MAGNETICS, 1993, 29 (06) :3849-3851
[2]   Domain processes and high frequency permeability of laminated Co91Nb6Zr3/SiO2 narrow strips [J].
Pan, G ;
Mapps, DJ ;
Kirk, KJ ;
Chapman, JN .
IEEE TRANSACTIONS ON MAGNETICS, 1997, 33 (05) :2857-2859
[3]   Laminated dual-axial anisotropy film for submicrometer-trackwidth thin-film heads [J].
Pan, GH ;
Takahashi, S ;
Mapps, DJ ;
Yamakawa, K ;
Honda, N ;
Ouchi, K .
IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (05) :3778-3782
[4]   Track profile study of ABS-patterned narrow track thin film inductive heads [J].
Partee, C ;
Torabi, AF .
IEEE TRANSACTIONS ON MAGNETICS, 1996, 32 (05) :3539-3541
[5]   INVESTIGATION OF MICROMAGNETIC EDGE STRUCTURES OF DOUBLE-LAYER PERMALLOY-FILMS [J].
RUHRIG, M ;
RAVE, W ;
HUBERT, A .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1990, 84 (1-2) :102-108
[6]   MICROMAGNETICS OF CLOSED-EDGE LAMINATIONS [J].
SLONCZEWSKI, JC .
IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) :1322-1327
[7]   MICROMAGNETICS OF LAMINATED PERMALLOY-FILMS [J].
SLONCZEWSKI, JC ;
PETEK, B ;
ARGYLE, BE .
IEEE TRANSACTIONS ON MAGNETICS, 1988, 24 (03) :2045-2054
[8]   SIDE FRINGING OF THIN-FILM HEADS WITH POLE TRIMMING [J].
SU, JL ;
JU, K ;
LO, J ;
COUNTRYMAN, G .
IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) :2463-2465
[9]   THE THIN-FILM HEAD FOR VCR [J].
SUZUKI, T ;
ABE, I ;
MIZUGUCHI, T ;
MORITA, O ;
TAKINO, H .
IEEE TRANSACTIONS ON MAGNETICS, 1994, 30 (06) :3936-3938
[10]   The effect of yoke length on nonlinear transition shift in inductive/MR composite heads [J].
Takagishi, M ;
Komaki, K ;
Hikami, F .
IEEE TRANSACTIONS ON MAGNETICS, 1997, 33 (05) :2821-2823