A piezoelectric triaxial accelerometer

被引：62

作者：

Scheeper, P

Gullov, JO

Kofoed, LM

机构：

[1] Brüel and Kjær A/S, 2850 Nærum

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1996年 / 6卷 / 01期

关键词：

D O I：

10.1088/0960-1317/6/1/032

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new piezoelectric silicon accelerometer design is presented. The design allows sensing in three directions. The accelerometer is designed to have a detection level of 10(-3) m s(-2) Hz(-1/2) and a resonance frequency of 10 kHz.

引用

页码：131 / 133

页数：3

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