The utilization of low temperature co-fired ceramics (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor

被引：66

作者：

Gongora-Rubio, M

Solá-Laguna, LM

Moffett, PJ

Santiago-Avilés, JJ

机构：

[1] Univ Penn, Moore Sch Elect Engn, Philadelphia, PA 19104 USA

[2] IPT, Sao Paulo, Brazil

[3] Dupont Co, Expt Stn, Wilmington, DE 19880 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 73卷 / 03期

关键词：

LTCC; meso-scale EMS; flow sensors;

D O I：

10.1016/S0924-4247(98)00238-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

For certain applications the small size characteristics of MEMS structures can be traded off for low cost production and high manufacturing yields. This is the realm of meso-scale (intermediate scale) electromechanical systems. Low temperature co-fired ceramic tape materials offers the potential of emulating a great deal of silicon MEMS technology at the meso scale level. In this article we show the design, construction, characterization and modeling of a thermistor based flow sensor totally constructed using LTCC tapes and the hybrid microelectronics technology. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：215 / 221

页数：7

共 10 条

[1]

BROUGHTON J, 1974, IEEE T INSTRUMENTATI, V23, P1

[2]

*DUP NEM EL TECHN, 1995, FOD DIEL PAST THICK

[3]

*DUP NEM EL TECHN, 1994, GREEN TAP MAT SYST D

[4]

*DUP NEM EL TECHN, 1995, DIFF PATT SYST THICK

[5]

KEELER R, 1987, ELECT PKG PROD, V5, P40

[6] THICK-FILM TECHNOLOGY - AN INTRODUCTION TO THE MATERIALS [J].

LARRY, JR ;

ROSENBERG, RM ;

UHLER, RO .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1980, 3 (02) :211-225

[7]

THANH TD, 1984, IMC P TOKY JAP, P220

[8]

TODA I, 1997, SIMPLE TEMPERATURE A, V57, P197

[9] A SELF-HEATED THERMISTOR FLOWMETER FOR SMALL LIQUID FLOW IN MICROCHANNELS [J].

YANG, CQ ;

KUMMEL, M ;

SOEBERG, H .

SENSORS AND ACTUATORS, 1988, 15 (01) :51-62

[10]

YOUNG S, 1986, MULTILAYER CERAMIC T, P403

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