Molecular dynamics study of non-equilibrium energy transport from a cylindrical track:: Part II -: Spike models for sputtering yield

被引:57
作者
Bringa, EM [1 ]
Johnson, RE
Dutkiewicz, L
机构
[1] Univ Virginia, Dept Engn Phys, Charlottesville, VA 22903 USA
[2] Jagiellonian Univ, Inst Phys, PL-30059 Krakow, Poland
基金
美国国家科学基金会;
关键词
sputtering; spike models; irradiation effects in solids; energy transport; condensed-gas solids;
D O I
10.1016/S0168-583X(99)00066-X
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Thermal spike models have been used to calculate the yields for electronic sputtering of condensed-gas solids by fast ions. In this paper molecular dynamics (MD) calculations are carried out to describe the evolution of solid Ar and Oz following the excitation of a cylindrical track in order to test spike models. The calculated sputtering yields were found to depend linearly on the energy deposition per unit path length, dE/dx, at the highest dE/dx. This is in contrast to the spike models and the measured yields for a number of condensed-gas solids which depend quadratically on dE/dx at high dE/dx. In paper I [E.M. Bringa, R.E. Johnson, Nucl. Instr. and Meth. B 143 (1998) 513] we showed that the evolution of energy from the cylindrical track was, typically, not diffusive, as assumed in the spike models. Here we show that it is the description of the radial transport and the absence of energy transport to the surface, rather than the treatment of the ejection process, that accounts for the difference between the analytic spike models and the MD calculations. Therefore, the quadratic dependence on dE/dx of the measured sputtering yield reflects the nature of the energizing process rather than the energy transport. In this paper we describe the details of the sputtering process and compare the results here for crystalline samples to the earlier results for amorphous solids. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:267 / 290
页数:24
相关论文
共 47 条
[1]   Molecular dynamics simulation of damage formation by cluster ion impact [J].
Aoki, T ;
Matsuo, J ;
Insepov, Z ;
Yamada, I .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4) :49-52
[2]  
Averback RS, 1998, SOLID STATE PHYS, V51, P281
[3]   MOLECULAR-DYNAMICS SIMULATION OF PROMPT SPUTTERING OF A MOLECULAR-SOLID AT HIGH-EXCITATION DENSITIES [J].
BANERJEE, S ;
JOHNSON, RE ;
CUI, ST ;
CUMMINGS, PT .
PHYSICAL REVIEW B, 1991, 43 (16) :12707-12714
[4]  
BANERJEE S, 1991, SURF SCI, V255, pL504, DOI 10.1016/0039-6028(91)90003-B
[5]   ENERGY AND ANGULAR-DISTRIBUTIONS OF SPUTTERED PARTICLES [J].
BETZ, G ;
WIEN, K .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, 1994, 140 :1-110
[7]   Molecular dynamics study of non-equilibrium energy transport from a cylindrical track - I. Test of "spike" models [J].
Bringa, EM ;
Johnson, RE .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 143 (04) :513-535
[8]  
BRINGA EM, IN PRESS NUCL INST B
[9]   SPUTTERING OF ICES BY HIGH-ENERGY PARTICLE IMPACT [J].
BROWN, WL ;
LANZEROTTI, LJ ;
MARCANTONIO, KJ ;
JOHNSON, RE ;
REIMANN, CT .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 14 (4-6) :392-402
[10]   FAST ION-BOMBARDMENT OF ICES AND ITS ASTROPHYSICAL IMPLICATIONS [J].
BROWN, WL ;
LANZEROTTI, LJ ;
JOHNSON, RE .
SCIENCE, 1982, 218 (4572) :525-531