Deposition of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering

被引：87

作者：

Wu, WF ^{[1
]}

Chiou, BS ^{[1
]}

机构：

[1] NATL CHIAO TUNG UNIV,INST ELECT,HSINCHU 30039,TAIWAN

来源：

THIN SOLID FILMS | 1997年 / 298卷 / 1-2期

关键词：

coatings; indium oxide; optical properties; sputtering;

D O I：

10.1016/S0040-6090(96)09311-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Indium tin oxide (ITO) films have been deposited onto polycarbonate (PC) substrates by radio frequency (rf) magnetron sputtering. The influence of the oxygen content during sputtering on the film morphology, and the electrical and optical properties of the films have been investigated. Both the refractive index and the extinction coefficient decrease with increasing oxygen content. In this study, the figures of merit T-10/R-sh of the films are higher than those for low-temperature sputtered films reported in the literature. (C) 1997 Elsevier Science S.A.

引用

页码：221 / 227

页数：7

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