Novel method for fabricating microlens arrays

被引:5
作者
Guo, LR
Chen, B
Pang, L
Du, CL
Zhou, ZB
机构
来源
MICRO-OPTICAL TECHNOLOGIES FOR MEASUREMENT, SENSORS, AND MICROSYSTEMS II AND OPTICAL FIBER SENSOR TECHNOLOGIES AND APPLICATIONS | 1997年 / 3099卷
关键词
microlens arrays; microphotoetching; continuous phase; photobiochemical etching; replication technology;
D O I
10.1117/12.281213
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel method for fabricating microlens arrays (MLA) with continuous phase-relief has been proposed in this paper. It includes three main parts in details: obtaining continuous exposure on photolithographic materials by using moving mask method; fabricating continuous MLA on gelatin by enzyme treatment; Replicating MLA to polymer by prepolymerize monomer injection molding techniques. The microlens has parabolic section profile and no dead area, it has the merits of high integration, high energy usage, and less chromatic aberration, especially is useful for broadband application. This method is fast and convenient than Binary Optics method or Laser direct writing techniques.
引用
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页码:99 / 106
页数:8
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