An integrated BioMEMS fabrication technology

被引：13

作者：

Gadre, A ^{[1
]}

Kastantin, M ^{[1
]}

Li, S ^{[1
]}

Ghodssi, R ^{[1
]}

机构：

[1] Univ Maryland, Dept Elect & Comp Engn, Syst Res Inst, College Pk, MD 20742 USA

来源：

2001 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM, PROCEEDINGS | 2001年

关键词：

D O I：

10.1109/ISDRS.2001.984471

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：186 / 189

页数：4

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