Rarefied gas flow through a long rectangular channel

被引:152
作者
Sharipov, F [1 ]
机构
[1] Univ Fed Parana, Dept Fis, BR-81531990 Curitiba, Parana, Brazil
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1999年 / 17卷 / 05期
关键词
D O I
10.1116/1.582006
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The mass flow rate of a rarefied gas through a long channel with a rectangular cross section has been calculated based on the model kinetic equation for the whole range of the Knudsen number and in the wide range of the height-to-width ratio. First, the reduced flow rate through a cross section has been calculated as a function of the local rarefaction parameter assuming the pressure gradient to be small. A criterion of the lateral wall influence on the flow rate has been given. Then, the mass flow rate has been calculated as; a function of the rarefaction parameters on the channel ends. The last result is obtained for any pressure ratio even if the flow varies along the channel from the hydrodynamic regime to the free molecular one. (C) 1999 American Vacuum Society. [S0734-2101(99)02105-3].
引用
收藏
页码:3062 / 3066
页数:5
相关论文
共 15 条
[1]  
AKINSHIN VD, 1989, ZH PRIKL MEKH TEKHN, V5, P48
[2]   NUMERICAL EVALUATION OF THE SLIP COEFFICIENT [J].
ALBERTONI, S ;
CERCIGNANI, C ;
GOTUSSO, L .
PHYSICS OF FLUIDS, 1963, 6 (07) :993-996
[3]  
[Anonymous], J APPL MATH PHYS ZAM
[4]   A MODEL FOR COLLISION PROCESSES IN GASES .1. SMALL AMPLITUDE PROCESSES IN CHARGED AND NEUTRAL ONE-COMPONENT SYSTEMS [J].
BHATNAGAR, PL ;
GROSS, EP ;
KROOK, M .
PHYSICAL REVIEW, 1954, 94 (03) :511-525
[5]   VARIATIONAL APPROACH TO BOUNDARY-VALUE PROBLEMS IN KINETIC THEORY [J].
CERCIGNANI, C ;
PAGANI, CD .
PHYSICS OF FLUIDS, 1966, 9 (06) :1167-+
[6]   Unsteady gaseous flows in rectangular microchannels: frequency response of one or two pneumatic lines connected in series [J].
Colin, S ;
Aubert, C ;
Caen, R .
EUROPEAN JOURNAL OF MECHANICS B-FLUIDS, 1998, 17 (01) :79-104
[7]  
LOYALKA SK, 1976, J VAC SCI TECHNOL, V16, P1188
[8]  
PORODNOV BT, 1969, IZV VYSSH UCHEBN ZAV, V9, P105
[9]  
PORODNOV BT, 1970, J TECH PHYS, V40, P2383
[10]  
SHAPIROV FM, 1991, P 17 INT S VCH WEINH, P605