Effects of size and number density of micro-reentrant cavities on boiling heat transfer from a silicon chip immersed in degassed and gas-dissolved FC-72

被引:69
作者
Kubo, H
Takamatsu, H
Honda, H [1 ]
机构
[1] Kyushu Univ, Interdisciplinary Grad Sch Engn Sci, Kasuga, Fukuoka 8168580, Japan
[2] Kyushu Univ, Inst Adv Mat Study, Kasuga, Fukuoka 8168580, Japan
关键词
immersion cooling; silicon chip; micro-reentrant cavity; cavity mouth size; cavity number density; FC-72;
D O I
10.1615/JEnhHeatTransf.v6.i2-4.80
中图分类号
O414.1 [热力学];
学科分类号
摘要
Boiling heat transfer of FC-72 from newly developed treated surfaces with micro-reentrant cavities was studied experimentally. The surface structure was fabricated on a silicon chip by use of microelectronic fabrication techniques. Four kinds of treated surfaces with the combinations of two cavity mouth diameters (about 1.6 mu m and 3.1 mu m) and two number densities of the micro-reentrant cavities (811/cm(2) and 96 x 10(3) l/cm(2)) were tested along with a smooth surface. Experiments were conducted at the liquid subcoolings of 3 K and 25 K with degassed and gas-dissolved FC-72. While the wall superheat at boiling incipience was strongly dependent on the dissolved gas content; it was little affected by the cavity mouth diameter and the liquid subcooling. The heat transfer performance of the treated surface was considerably higher than that of the smooth surface. The highest performance was obtained with a treated surface with a larger cavity mouth diameter and a larger cavity number density. The results were compared with those for previously developed treated surfaces.
引用
收藏
页码:151 / 160
页数:10
相关论文
共 11 条
[1]   Microelectronic Cooling by Enhanced Pool Boiling of a Dielectric Fluorocarbon Liquid [J].
Anderson, T. M. ;
Mudawar, I. .
JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 1989, 111 (1-4) :752-759
[2]  
CARVALHO RD, 1990, P 9 INT HEAT TRANSF, V2, P289
[3]  
CHU RC, 1977, Patent No. 4650507
[4]   EFFECTS OF BOILING HISTORY ON A MICROCONFIGURED SURFACE IN A DIELECTRIC LIQUID [J].
MILLER, WJ ;
GEBHART, B ;
WRIGHT, NT .
INTERNATIONAL COMMUNICATIONS IN HEAT AND MASS TRANSFER, 1990, 17 (04) :389-398
[5]  
NAKAYAMA W, 1984, 84WAHT89 ASME
[6]   Gas-saturated pool boiling heat transfer from smooth and microporous surfaces in FC-72 [J].
OConnor, JP ;
You, SM ;
Chang, JY .
JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 1996, 118 (03) :662-667
[7]   A DIELECTRIC SURFACE COATING TECHNIQUE TO ENHANCE BOILING HEAT-TRANSFER FROM HIGH-POWER MICROELECTRONICS [J].
OCONNOR, JP ;
YOU, SM ;
PRICE, DC .
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART A, 1995, 18 (03) :656-663
[8]   A PAINTING TECHNIQUE TO ENHANCE POOL BOILING HEAT-TRANSFER IN SATURATED FC-72 [J].
OCONNOR, JP ;
YOU, SM .
JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 1995, 117 (02) :387-393
[9]  
OKTAY S, 1972, Patent No. 3706127
[10]  
You S.M., 1991, IEEE Trans. Compon. Packag. Manuf. Tech, V15, P90