Fast LBIC in-line characterization for process quality control in the photovoltaic industry

被引:28
作者
Acciarri, M
Binetti, S
Racz, A
Pizzini, S
Agostinelli, G
机构
[1] Univ Milano Bicocca, INFM, Dept Mat Sci, I-20126 Milan, Italy
[2] European Commiss, Joint Res Ctr, Renewable Energies Unit, I-21020 Ispra, Italy
关键词
LBIC; photocurrent; efficiency;
D O I
10.1016/S0927-0248(01)00189-1
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
The photovoltaic industry asks for fast, non-destructive techniques for in-line characterization tools in solar cells production. We shall show in this paper that the use of the light beam induced current technique (LBIC) is capable to get in a few seconds time photocurrent maps of large area solar cells and to correlate these data with the cell efficiency. The samples analysed in this study are industrial 10 x 10cm(2) multicrystalline silicon solar cells. The LBIC setup works with three laser sources at 633, 780 and 830 nm, taking the laser beam power below 1 mW. The laser beams are moved on the wafer surfaces using a galvanometer x-y scanner system and the beam size on the focus has a diameter of about 65 Pm. We demonstrated the possibility to obtain quantitative information about the cell quality in <3s from the photocurrent maps with a pretty good correlation with the efficiency data. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:417 / 424
页数:8
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