Micromechanical properties of BN and B-C-N coatings obtained by r.f. plasma-assisted CVD

被引：39

作者：

Polo, MC ^{[1
]}

Martínez, E ^{[1
]}

Esteve, J ^{[1
]}

Andújar, JL ^{[1
]}

机构：

[1] Univ Barcelona, Dept Fis Aplicada & Opt, E-08028 Barcelona, Spain

来源：

关键词：

hard coatings; microscratch; nanohardness; nitrides; r.f. plasma CVD;

D O I：

10.1016/S0925-9635(98)00378-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have obtained highly transparent and hard BN films in a capacitively coupled r.f. plasma-assisted CVD reactor from three different gas mixtures: B2H6-H-2-NH3, B2H6-N-2 and B2H6-N-2-Ar. It was found that the films were smooth, dense, and had a textured hexagonal structure with the basal planes perpendicular to the film surface. The microhardness, friction coefficient and adhesion of these coatings were measured by nanoindentation and microscratching. BCxNy films were also prepared in the same plasma-assisted CVD reactor from B2H6-N-2-CH4 gas mixtures. The carbon content in the films was varied by using different CH4 flow rates. These films had a less ordered structure. The mechanical properties of these films had been compared to those of hexagonal BN films. Microhardness measurements showed that there is a correlation between film composition and hardness of the BCN films. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：423 / 427

页数：5

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