共 12 条
[1]
Protecting groups for 193-nm photoresists
[J].
ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XIII,
1996, 2724
:334-343
[2]
ALLEN RD, 1997, HDB MICROLITHOGRAPHY, pCH4
[3]
ALLEN RD, 1996, J PHOTOPOLYM SCI TEC, V9, P465
[4]
Colvin EW, 1988, SILICON REAGENTS ORG, P1
[6]
DEKAR JL, 1990, J AM CHEM SOC, V112, P6004
[7]
IWASA S, 1996, J PHOTOPOLYM SCI TEC, V9, P447
[8]
KIM J, 1998, J POLYM, V40, P1617
[9]
Nozaki K., 1996, J PHOTOPOLYM SCI TEC, V9, P509