Controlled thickness deposition of ultrathin ceramic films by spin coating

被引：16

作者：

Leite, Edson Roberto ^{[1
]}

Lee, Eduardo Jian Hua ^{[1
]}

Ribeiro, Caue ^{[1
]}

Longo, Elson ^{[1
]}

机构：

[1] Univ Fed Sao Carlos, Dept Chem, BR-13560905 Sao Carlos, SP, Brazil

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 2006年 / 89卷 / 06期

关键词：

D O I：

10.1111/j.1551-2916.2006.00992.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This work describes the combined use of nanocrystal water-based colloidal suspensions with spin-coating deposition in order to obtain ultrathin ceramic films. We have used tin oxide (SnO2) nanoparticles, with particle diameter sizes ranging from 1-5.5 nm, to develop the deposition approach. Films obtained under several conditions were characterized by ellipsometry and atomic force microscopy, showing that the process has the ability to produce ultrathin ceramic films, with thickness ranging from 10-100 nm, with good particle packing. Additionally, electrical measurements in the films indicate good homogeneity and potential for various applications.

引用

页码：2016 / 2020

页数：5

共 19 条

[1] Solution-based fabrication of high-k gate dielectrics for next-generation metal-oxide semiconductor transistors [J].

Aoki, Y ;

Kunitake, T .

ADVANCED MATERIALS, 2004, 16 (02) :118-+

[2] Nanoengineering of inorganic and hybrid hollow spheres by colloidal templating [J].

Caruso, F ;

Caruso, RA ;

Möhwald, H .

SCIENCE, 1998, 282 (5391) :1111-1114

[3] SnO2 nanocrystals in SiO2:: A wide-band-gap quantum-dot system [J].

Chiodini, N ;

Paleari, A ;

Di Martino, D ;

Spinolo, G .

APPLIED PHYSICS LETTERS, 2002, 81 (09) :1702-1704

[4]

Cho J, 2001, ADV MATER, V13, P1076, DOI 10.1002/1521-4095(200107)13:14<1076::AID-ADMA1076>3.0.CO

[5]

2-M

[6] BUILDUP OF ULTRATHIN MULTILAYER FILMS BY A SELF-ASSEMBLY PROCESS .3. CONSECUTIVELY ALTERNATING ADSORPTION OF ANIONIC AND CATIONIC POLYELECTROLYTES ON CHARGED SURFACES [J].

DECHER, G ;

HONG, JD ;

SCHMITT, J .

THIN SOLID FILMS, 1992, 210 (1-2) :831-835

[7] Ultrathin organic films grown by organic molecular beam deposition and related techniques [J].

Forrest, SR .

CHEMICAL REVIEWS, 1997, 97 (06) :1793-1896

[8] High-κ dielectrics for advanced carbon-nanotube transistors and logic gates [J].

Javey, A ;

Kim, H ;

Brink, M ;

Wang, Q ;

Ural, A ;

Guo, J ;

McIntyre, P ;

McEuen, P ;

Lundstrom, M ;

Dai, HJ .

NATURE MATERIALS, 2002, 1 (04) :241-246

[9] Layer-by-layer deposited multilayer assemblies of ionene-type polyelectrolytes based on the spin-coating method [J].

Lee, SS ;

Hong, JD ;

Kim, CH ;

Kim, K ;

Koo, JP ;

Lee, KB .

MACROMOLECULES, 2001, 34 (16) :5358-5360

[10] Sintering of ultrafine undoped SnO2 powder [J].

Leite, ER ;

Cerri, JA ;

Longo, E ;

Varela, JA ;

Paskocima, CA .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2001, 21 (05) :669-675

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