Integrating nanotechnology into a working storage device

被引：32

作者：

Knoll, A. ^{[1
]}

Baechtold, P. ^{[1
]}

Bonan, J. ^{[1
]}

Cherubini, G. ^{[1
]}

Despont, M. ^{[1
]}

Drechsler, U. ^{[1
]}

Duerig, U. ^{[1
]}

Gotsmann, B. ^{[1
]}

Haeberle, W. ^{[1
]}

Hagleitner, C. ^{[1
]}

Jubin, D. ^{[1
]}

Lantz, M. A. ^{[1
]}

Pantazi, A. ^{[1
]}

Pozidis, H. ^{[1
]}

Rothuizen, H. ^{[1
]}

Sebastian, A. ^{[1
]}

Stutz, R. ^{[1
]}

Vettiger, P. ^{[1
]}

Wiesmann, D. ^{[1
]}

Eleftheriou, E. S. ^{[1
]}

机构：

[1] IBM Res GmbH, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland

来源：

MICROELECTRONIC ENGINEERING | 2006年 / 83卷 / 4-9期

关键词：

MEMS; AFM; probe storage; polymers;

D O I：

10.1016/j.mee.2006.01.206

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The thermomechanical scanning-probe-based data storage concept, internally known as the "millipede" project, combines ultrahigh density, small form factor, and high data rates. Ultrahigh storage densities of more than 1 Tb/in(2) can be achieved by using local-probe techniques to write, read back, and erase data in very thin polymer films. In this paper special focus is given to the crucial role of the polymer storage medium in thermomechanical probe storage systems. High data rates are achieved by parallel operation of large 2D arrays with thousands micro/nanomechanical cantilevers/tips that can be batch-fabricated by silicon surface-micromachining techniques. The very high precision required to navigate the probe tips over the storage medium is achieved by MEMS-based x/y actuators that position the large arrays of probe tips for parallel write/read/erase operations. The inherent parallelism, the ultrahigh areal densities and the small form factor may open up new perspectives and opportunities for application in areas beyond those envisaged today. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：1692 / 1697

页数：6

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