Miniaturized, focusing fan-out elements: design, fabrication and characterization

被引：6

作者：

Schilling, A

Nussbaum, P

Ossmann, C

Traut, S

Rossi, M

Schift, H

Herzig, HP

机构：

[1] Univ Neuchatel, Inst Microtech, CH-2000 Neuchatel, Switzerland

[2] Ctr Suisse Elect & Microtech SA, CH-8048 Zurich, Switzerland

[3] Paul Scherrer Inst, CH-5232 Villigen, Switzerland

来源：

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS | 1999年 / 1卷 / 02期

关键词：

focusing fan-out; injection moulding; reactive ion etching; direct laser writing; optical interconnects;

D O I：

10.1088/1464-4258/1/2/025

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present miniaturized, focusing fan-out elements. The new micro-optical elements were fabricated using different technologies: double-sided injection moulding in polycarbonate, double-sided photolithography with subsequent transfer in quartz and direct laser writing in photoresist. The fan-out elements were characterized by measuring their efficiency and uniformity, the surface profiles of the microlenses were measured with a Twyman-Green interferometer. The overall performance of the combined, hybrid elements is demonstrated with intensity distributions recorded in the focal planes.

引用

页码：244 / 248

页数：5

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