Noncollimated bidirectional shearing interferometer for measuring a long radius of curvature

被引：4

作者：

Lee, YW

Cho, HM

Shin, DJ

Lee, IW

机构：

[1] Quantum Metrology Division, Korea Research Institute of Standards and Science, Taejon, Yusong, 305-600

来源：

APPLIED OPTICS | 1997年 / 36卷 / 22期

关键词：

radius of curvature; bidirectional shearing interferometer; noncollimated illumination;

D O I：

10.1364/AO.36.005317

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A method for measuring a long radius of curvature with a modified half-aperture bidirectional shearing interferometer is described. A plane mirror of the interferometer is replaced with a test mirror, and the incident beam is decollimated by shifting of the source to equalize the widths of the bidirectional shearing fringes reflected from the plane and test mirrors. This method can be applied to concave and convex surfaces. (C) 1997 Optical Society of America.

引用

页码：5317 / 5320

页数：4

共 9 条

[1]

Born M, 1980, PRINCIPLES OPTICS, P152

[2]

KOTHIYAL MP, 1989, OPT LASER TECHNOL, V20, P139

[3] Measurement of a long radius of curvature using a half-aperture bidirectional shearing interferometer [J].