Automated calibration of the sample image using crystalline lattice for scale reference in scanning tunneling microscopy

被引:4
作者
Kawakatsu, H
Kougami, H
机构
[1] Institute of Industrial Science, University of Tokyo, Minato-ku, Tokyo 106
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1996年 / 14卷 / 01期
关键词
D O I
10.1116/1.589038
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article describes the configuration and application of nn image processing software developed for extracting periodic atomic features from scanning tunneling microscopy (STM) images. This was done with a view to calibrating the lateral and/or vertical scale of images acquired by a STM with two tunneling units, where a crystal can be used as the scale reference with one of the tunneling units. The image processing software was applied to consecutively acquired images of graphite with a size of 150x5 nm. The number of lattices automatically counted in a line scan of 150 nm, scanned in 400 ms, showed a matching of 99.95% from one image to the other. On the other hand, the matching in the feed direction, where image width was only 5 nm, but took 240 s, was 95%. As an example of application of the developed software, nonlinear movement of piezoscanners were readily monitored in the 100 nm order. (C) 1996 American Vacuum Society.
引用
收藏
页码:11 / 14
页数:4
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