Kinetic characteristics of production and loss of nitrogen atoms in N2 plasma

被引:36
作者
Brovikova, IN [1 ]
Galiaskarov, EG [1 ]
机构
[1] Ivanovo State Univ Chem Technol, Ivanovo, Russia
关键词
D O I
10.1023/A:1013174518832
中图分类号
O59 [应用物理学];
学科分类号
摘要
The method of electron paramagnetic resonance (EPR) is used to measure the rates of production and concentration of nitrogen atoms, the rate constants of their heterogeneous loss, and some electrophysical characteristics of plasma at gas pressures of 60-533 Pa and discharge currents of 10-80 mA in the positive column of a d.c. discharge in N-2. Analysis of the dissociation processes revealed that, in addition to the decay of electron states excited from N-2(X(1)Sigmag) by electron impact, reactions involving excited nitrogen molecules may play an important role in the formation of N atoms.
引用
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页码:809 / 814
页数:6
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