Effects of reactor pressure on two-dimensional radio-frequency methane plasma: a numerical study

A self-consistent two-dimensional radio-frequency glow discharge model has been developed for methane gas using a fluid model. The objective of the study is to provide insights into charged-species dynamics and investigate their effects on deposition in a polyatomic gas discharge. Swarm data as a function of electron energy are provided as input to the model. The necessary de bias for the discharge is also predicted consistently such that the cycle-averaged current to the powered electrode becomes zero. The predictions provide a comprehensive understanding of the various processes in methane discharges found in plasma-assisted chemical vapour deposition (PACVD) reactors for the deposition of carbon films. The effects of discharge pressure on discharge variables are identified and presented in the paper.