Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope

被引:75
作者
Fukano, T
Yamaguchi, I
机构
[1] Saitama Univ, Grad Sch Sci & Engn, Urawa, Saitama 3388570, Japan
[2] RIKEN, Inst Phys & Chem Res, Opt Engn Lab, Wako, Saitama 3510198, Japan
关键词
D O I
10.1364/AO.38.004065
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An improved system for the separate measurement of the refractive index and the geometrical thickness that constitutes a hybrid configuration of a confocal microscope and a wavelength-scanning heterodyne interferometer with a laser diode is presented. The optical path difference can be measured in less than 1 s, which is 10 times quicker than with the low-coherence interferometry previously used, and with a resolution of 10 mu m with a fixed reference mirror. Separate measurement of the refractive index and the geometrical thickness of glass plates was demonstrated by use of the arrangement in place of the low-coherence interferometer used previously. (C) 1999 Optical Society of America.
引用
收藏
页码:4065 / 4073
页数:9
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