Modeling of laser induced plasma, spectroscopic and time of flight experiments in pulsed laser deposition

被引:20
作者
Granse, G
Vollmar, S
Lenk, A
Rupp, A
Rohr, K
机构
[1] FRAUNHOFER INST WERKSTOFFPHYS & SCHICHTTECHNOL,D-01069 DRESDEN,GERMANY
[2] UNIV KAISERSLAUTERN,FACHBEREICH PHYS,D-67663 KAISERSLAUTERN,GERMANY
关键词
D O I
10.1016/0169-4332(95)00426-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Time of flight and optical emission spectroscopy of laser induced plasmas, typically occurring with Pulsed Laser Deposition, will be compared and interpreted by the results of a complex theoretical model, The model includes the fluid dynamics of the plasma, absorption of the laser energy via inverse bremsstrahlung and the dynamics of ionisation and recombination processes. Experimental results as well as model calculations are shown for different lasers and materials.
引用
收藏
页码:97 / 101
页数:5
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