A micromachined high-Q X-band resonator

被引：88

作者：

Papapolymerou, J

Cheng, JC

East, J

Katehi, LPB

机构：

[1] Dept. of Elec. Eng. and Comp. Sci., University of Michigan, Ann Arbor

来源：

IEEE MICROWAVE AND GUIDED WAVE LETTERS | 1997年 / 7卷 / 06期

关键词：

D O I：

10.1109/75.585207

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This letter presents a new structure which can be used as a microwave high-Q resonator for the development of narrow-band low-loss filters in a planar environment. The resonator is made of a low-loss micromachined cavity which is easy to integrate with monolithic circuits. Compared to conventional metallic resonators, the performance of this resonator is similar, but the weight and size are significantly reduced.

引用

页码：168 / 170

页数：3

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