The photochemistry of thin films of titanium diacetylacetonate diisopropoxide on silicon surfaces

The photochemistry of films of Ti(acac)(2)(i-prop)(2) (i-prop = CHO(CH3)(2) acac = CH3COCHCOCH3) is presented. Films of Ti(acac)(2) (i-prop)(2) can be cast on silicon surfaces and upon irradiation in air are converted to titanium dioxide films. The organic photoproducts, which are ejected from the film, were identified by mass spectroscopy to be 2-propanone, acetylacetone and 3-pentane-2-one. The remaining product, which constituted the film, was titanium oxide which upon air oxidation is converted to amorphous titanium dioxide. Heat treatment of the titanium dioxide film resulted in the crystallization of anatase at temperatures below 700 degreesC and rutile at temperatures above 1100 degreesC. Heat treatment at intermediate temperatures resulted in the formation of mixtures of anatase and rutile. (C) 2002 Published by Elsevier Science B.V.