机构:
SHARP CO LTD,PRECIS TECHNOL DEV CTR,TENRI,NARA 632,JAPANSHARP CO LTD,PRECIS TECHNOL DEV CTR,TENRI,NARA 632,JAPAN
Hirata, S
[1
]
Ishii, Y
论文数: 0引用数: 0
h-index: 0
机构:
SHARP CO LTD,PRECIS TECHNOL DEV CTR,TENRI,NARA 632,JAPANSHARP CO LTD,PRECIS TECHNOL DEV CTR,TENRI,NARA 632,JAPAN
Ishii, Y
[1
]
Matoba, H
论文数: 0引用数: 0
h-index: 0
机构:
SHARP CO LTD,PRECIS TECHNOL DEV CTR,TENRI,NARA 632,JAPANSHARP CO LTD,PRECIS TECHNOL DEV CTR,TENRI,NARA 632,JAPAN
Matoba, H
[1
]
Inui, T
论文数: 0引用数: 0
h-index: 0
机构:
SHARP CO LTD,PRECIS TECHNOL DEV CTR,TENRI,NARA 632,JAPANSHARP CO LTD,PRECIS TECHNOL DEV CTR,TENRI,NARA 632,JAPAN
Inui, T
[1
]
机构:
[1] SHARP CO LTD,PRECIS TECHNOL DEV CTR,TENRI,NARA 632,JAPAN
来源:
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS
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1996年