Low-power consumption silica-based 2 x 2 thermooptic switch using trenched silicon substrate

We propose a silica-based 2 x 2 thermooptic switch using heat insulating grooves and trenches on a Si substrate to reduce electric power consumption. The snitching power of a fabricated switch was successfully reduced to 135 mW, less than 1/3 that of a conventional switch. No detrimental effect on optical characteristics was observed: we obtained the insertion loss of 1 dB, the extinction ratio of better than 30 dB and no polarization dependency.