Functional imaging with chemically amplified resists and organic molecules

被引:23
作者
Vekselman, AM
Zhang, CH
Darling, GD
机构
[1] ACT MAT INC,RUSSELL,ON K4R 1C7,CANADA
[2] MCGILL UNIV,DEPT CHEM,MONTREAL,PQ H3A 2K6,CANADA
关键词
D O I
10.1021/cm960136p
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Chemically amplified resists were tested for preparing universal templates to bind various organic species in micron-scale patterns (functional images). PTV exposure and heating of a poly(di-tert-butyl fumarate-co-styrene):onium salt resist produced alternating areas of nonpolar ester and polar acid/anhydride polymers. Various compounds that were fluorescent dyes or amines could then be placed selectively either into of onto exposed or nonexposed areas, according to the nature of solvents and binding species. The ease and extent of immobilization were found to depend on (i) resist composition, (ii) matrix wettability and permeability by a solvent, and (iii) covalent, ionic, dipole-dipole, or other sorbate-matrix binding interactions.
引用
收藏
页码:1942 / 1948
页数:7
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