Automatic transfer of parametric FEM models into CAD-layout formats for top-down design of microsystems

被引:3
作者
Lang, M
David, D
Glesner, M
机构
来源
EUROPEAN DESIGN & TEST CONFERENCE - ED&TC 97, PROCEEDINGS | 1997年
关键词
D O I
10.1109/EDTC.1997.582359
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
A tool for the transfer of solid models used for FEM simulations into different layout formats used by CAD environments is presented AII necessary layers for the fabrication of microcomponents and -systems in a given extended commercial CMOS process are generated automatically by this tool. Starting with an acceleration sensor the use of this translator for an application in the top-down design of microsystems with parametric components is described.
引用
收藏
页码:200 / 204
页数:5
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