Complex optical surfaces formed by replica molding against elastomeric masters

被引:528
作者
Xia, YN
Kim, E
Zhao, XM
Rogers, JA
Prentiss, M
Whitesides, GM
机构
[1] HARVARD UNIV,DEPT CHEM,CAMBRIDGE,MA 02138
[2] HARVARD UNIV,DEPT PHYS,CAMBRIDGE,MA 02138
关键词
D O I
10.1126/science.273.5273.347
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Complex, optically functional surfaces in organic polymers can be fabricated by replicating relief structures present on the surface of an elastomeric master with an ultraviolet or thermally curable organic polymer, while the master is deformed by compression, bending, or stretching, The versatility of this procedure for fabricating surfaces with complex, micrometer- and submicrometer-scale patterns was demonstrated by the production of (i) diffraction gratings with periods smaller than the original grating; (ii) chirped, blazed diffraction gratings (where the period of a chirped grating changes continuously with position) on planar and curved surfaces; (iii) patterned microfeatures on the surfaces of approximately hemispherical objects (for example, an optical surface similar to a fly's eye); and (iv) arrays of rhombic microlenses, These topologically complex, micropatterned surfaces are difficult to fabricate with other techniques.
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页码:347 / 349
页数:3
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